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52| Job Title | Company | Salary | City | Year |
| Senior Reliability Engineer | Axcelis Technologies | $87,000 | Beverly, MA, 01915 | 04/30/2004 |
| Senior Reliability Engineer | Axcelis Technologies | $82,000 | Beverly, MA, 01915 | 05/01/2001 |
| Senior Reliability Engineer | Axcelis Technologies | $82,000 | Beverly, MA, 01915 | 05/01/2001 |
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Senior Reliability Engineer KLA-Tencor - Milpitas, CA |
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Axcelis Technologies Senior Reliability Engineer salary is full-time annual starting salary. Intern, contractor and hourly pay scale vary from regular exempt employee. Compensation depends on work experience, job location, bonus, benefits and other factors.